Investigation of Gas Sensing Performance of CuO/Cu 2 O Thin Films as a Function of Au-NP Size for CO, CO 2 , and Hydrocarbons Mixtures

This study examines the impact of Au nanoparticles (Au-NPs) on the chemoresistive gas sensing properties as a function of particle size. The sensing material is composed of ultrathin CuO/Cu 2 O films, which are fabricated by either thermal deposition technology or spray pyrolysis. These are used on a silicon nitride (Si 3 N 4 ) micro hotplate (µh) chip with Pt electrodes and heaters. The gas sensing material is then functionalised with Au-NP of varying sizes (12, 20, and 40 nm, checked by transmission electron microscopy) using drop coating technology. The finalised sensors are tested by measuring the electrical resistance against various target gases, including carbon monoxide (CO), carbon dioxide (CO 2 ), and a mixture of hydrocarbons (HC Mix ), in order to evaluate any cross-sensitivity issues. While the sensor response is markedly contingent on the structural surface, our findings indicate that the dimensions of the Au-NPs exert a discernible influence on the sensor’s behaviour in response to varying target gases. The 50 nm thermally evaporated CuO/Cu 2 O layers exhibited the highest sensor response of 78% against 2000 ppm CO 2 . In order to gain further insight into the surface of the sensors, a scanning electron microscope (SEM) was employed, and to gain information about the composition, Raman spectroscopy was also utilised.